Physics of Radio-Frequency Plasmas by Pascal Chabert, Nicholas Braithwaite

Physics of Radio-Frequency Plasmas



Download Physics of Radio-Frequency Plasmas




Physics of Radio-Frequency Plasmas Pascal Chabert, Nicholas Braithwaite
Language: English
Page: 395
Format: pdf
ISBN: 0521763002, 9780521763004
Publisher: Cambridge University Press

Book Description

Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion. With worked examples and over 100 in-text questions, this book will interest graduate students and researchers in applied physics and electrical engineering, helping them to develop physical arguments and mathematical analyses.

About the Author

Pascal Chabert is currently Research Director within CNRS. He leads the Low-Temperature Plasmas group of the Laboratoire de Physique des Plasmas at Ecole Polytechnique. His expertise is in plasma physics and plasma processing.

Nicholas Braithwaite is Professor of Engineering Physics at The Open University, where his research group work on the physics of 'technological' plasmas. He has been on the editorial board of the journal Plasma Sources Science and Technology since 1998.

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